Ultrathin dielectric films on Si:: Growth and properties

Ultrathin dielectric films on Si: Growth and properties

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	ISA Newsletter
Volume	9
Publication date	2005
Edition	March
Publication status	Published - 2005
Event	Ultrathin dielectric films on Si: - Duration: 24. Aug 2010 → …

Conference	Ultrathin dielectric films on Si:
Period	24/08/2010 → …

@inproceedings{79a31f10ddee11db9628000ea68e967b,

title = "Ultrathin dielectric films on Si:: Growth and properties",

author = "Per Morgen and Ali Bahari and C. Janfelt and K. Pedersen and Z.S. Li and B.G. Rao",

year = "2005",

language = "English",

volume = "9",

booktitle = "ISA Newsletter",

edition = "March",

note = "Ultrathin dielectric films on Si: ; Conference date: 24-08-2010",

}