Titanium Nitride as a Strain Gauge Material

Nis Dam Madsen, Mathias Hausladen, Serguei Chiriaev, Peter Johannesen, Zacarias Eduardo Fabrim, Paulo F. P. Fichtner, Jakob Kjelstrup-Hansen

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalI E E E Journal of Microelectromechanical Systems
Volume25
Issue number4
Pages (from-to)683-690
ISSN1057-7157
DOIs
Publication statusPublished - 2016

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