The Energy Dependence of Lattice Disorder in Ion‐Implanted Silicon

D. A. Marsden, BellavanGr, J. A. Davies, M. Martini, P. Sigmund

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalPhysica Status Solidi (B) Basic Research
Volume35
Issue number1
Pages (from-to)269-275
ISSN0370-1972
DOIs
Publication statusPublished - 1969
Externally publishedYes

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