Abstract
We present a novel template stripping procedure for fabricating metal films with imprinted nanostructures. The basic idea is to deposit a gold film onto a nano-structured substrate and subsequently strip the film from the substrate surface thereby revealing imprinted nanostructures in the film. The procedure can be applied to any nano-structured surface and film material as long as the adhesion between the substrate and film is low enough to allow subsequent stripping of the film. The procedure is demonstrated on silicon surfaces that have been nano-structured using colloidal lithography. The final result is a thin gold film with imprinted nano-cavities.
| Original language | English |
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| Publication date | 2009 |
| Number of pages | 2 |
| Publication status | Published - 2009 |
| Event | International Conference on Micro & Nano Engineering - Ghent, Belgium Duration: 28. Sep 2009 → 1. Oct 2009 Conference number: 35 |
Conference
| Conference | International Conference on Micro & Nano Engineering |
|---|---|
| Number | 35 |
| Country/Territory | Belgium |
| City | Ghent |
| Period | 28/09/2009 → 01/10/2009 |
Keywords
- Imprinted Nanostructures
- Template stripping
- Colloidal lithography
- Nanosensors