Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids

Ole Ellegaard, J Schou, B Stenum, H Sørensen, R Pedrys

Research output: Contribution to journal › Journal article › Research › peer-review

Translated title of the contribution	SPUTTERING YIELDS AND ENERGY-DISTRIBUTIONS FROM NONOVERLAPPING SUBSPIKES IN ION BOMBARDED VOLATILE SOLIDS
Original language	English
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	62
Issue number	4
Pages (from-to)	447-455
ISSN	0168-583X
DOIs	https://doi.org/10.1016/0168-583X(92)95376-3
Publication status	Published - 3. Jan 1992

Documents & Links

@article{dd137d8f2a5143dc8eba03fe4d6de48f,

title = "Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids",

author = "Ole Ellegaard and J Schou and B Stenum and H S{\o}rensen and R Pedrys",

year = "1992",

month = jan,

day = "3",

doi = "10.1016/0168-583X(92)95376-3",

language = "English",

volume = "62",

pages = "447--455",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Heinemann",

number = "4",

}

Research output: Contribution to journal › Journal article › Research › peer-review

TY - JOUR

T1 - Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids

AU - Ellegaard, Ole

AU - Schou, J

AU - Stenum, B

AU - Sørensen, H

AU - Pedrys, R

PY - 1992/1/3

Y1 - 1992/1/3

U2 - 10.1016/0168-583X(92)95376-3

DO - 10.1016/0168-583X(92)95376-3

M3 - Journal article

SN - 0168-583X

VL - 62

SP - 447

EP - 455

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 4

ER -