Sputtering of thin metal overlayers studied by electron spectroscopy and a quartz crystal microbalance method

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	2
Issue number	1-3
Pages (from-to)	666-669
Number of pages	4
ISSN	0168-583X
DOIs	https://doi.org/10.1016/0168-583X(84)90288-X
Publication status	Published - 1984

Documents & Links

@article{1d6e47d74cbd4daea3098eaf74faece5,

title = "Sputtering of thin metal overlayers studied by electron spectroscopy and a quartz crystal microbalance method",

author = "Jens Onsgaard and Ole Ellegaard",

year = "1984",

doi = "10.1016/0168-583X(84)90288-X",

language = "English",

volume = "2",

pages = "666--669",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Heinemann",

number = "1-3",

}

Research output: Contribution to journal › Journal article › Research › peer-review

TY - JOUR

T1 - Sputtering of thin metal overlayers studied by electron spectroscopy and a quartz crystal microbalance method

AU - Onsgaard, Jens

AU - Ellegaard, Ole

PY - 1984

Y1 - 1984

U2 - 10.1016/0168-583X(84)90288-X

DO - 10.1016/0168-583X(84)90288-X

M3 - Journal article

SN - 0168-583X

VL - 2

SP - 666

EP - 669

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 1-3

ER -