SPUTTERING OF SOLID NEON AND ARGON BY MEDIUM MASS IONS

J SCHOU, Ole Ellegaard, R PEDRYS, H SORENSEN

    Research output: Contribution to journalJournal articleResearchpeer-review

    Translated title of the contributionSPUTTERING OF SOLID NEON AND ARGON BY MEDIUM MASS IONS
    Original languageEnglish
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume65
    Issue number1-4
    Pages (from-to)173-176
    Number of pages4
    ISSN0168-583X
    Publication statusPublished - 1. Mar 1992

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