Translated title of the contribution | SPUTTERING OF SOLID NEON AND ARGON BY MEDIUM MASS IONS |
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Original language | English |
Journal | Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms |
Volume | 65 |
Issue number | 1-4 |
Pages (from-to) | 173-176 |
Number of pages | 4 |
ISSN | 0168-583X |
Publication status | Published - 1. Mar 1992 |
SPUTTERING OF SOLID NEON AND ARGON BY MEDIUM MASS IONS
J SCHOU, Ole Ellegaard, R PEDRYS, H SORENSEN
Research output: Contribution to journal › Journal article › Research › peer-review