Spatial distribution of energy deposited by ion bombardment

P. Sigmund, J. B. Sanders

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationColloque International sur les Applications des Faisceaux Ioniques a la Technologie des Semiconducteurs = International Conference on Applications of Ions [sic] Beams to Semiconductor Technology
Publication date1967
Pages1-23
Publication statusPublished - 1967
Externally publishedYes
EventInternational Conference on Applications of Ions [sic] Beams to Semiconductor Technology - Grenoble, France
Duration: 24. May 196726. May 1967

Conference

ConferenceInternational Conference on Applications of Ions [sic] Beams to Semiconductor Technology
CountryFrance
CityGrenoble
Period24/05/196726/05/1967

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