Quantitative analysis of reflection electron energy loss spectra for ultra-thin HfO2, Al2O3 and Hf-Al-O dielectric films on Si(100)

Hua Jin, Suhk Kun Oh, Hee Jae Kang, Sven Tougaard

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalOyo Buturi
Issue number100
Pages (from-to)083713
ISSN0369-8009
Publication statusPublished - 2006

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