Preferential sputtering from isotopic mixtures and alloys of near-neighbor elements

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	18
Issue number	1-6
Pages (from-to)	375-387
ISSN	0168-583X
DOIs	https://doi.org/10.1016/S0168-583X(86)80062-3
Publication status	Published - 1986

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@article{70fd9363473e40babe2812ac04605756,

title = "Preferential sputtering from isotopic mixtures and alloys of near-neighbor elements",

author = "P. Sigmund",

year = "1986",

doi = "10.1016/S0168-583X(86)80062-3",

language = "English",

volume = "18",

pages = "375--387",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "1-6",

}

TY - JOUR

T1 - Preferential sputtering from isotopic mixtures and alloys of near-neighbor elements

AU - Sigmund, P.

PY - 1986

Y1 - 1986

U2 - 10.1016/S0168-583X(86)80062-3

DO - 10.1016/S0168-583X(86)80062-3

M3 - Journal article

SN - 0168-583X

VL - 18

SP - 375

EP - 387

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 1-6

ER -