Piezoelectric MEMS-empowered dynamic optical metasurfaces

Fei Ding*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

We have demonstrated an electrical-driven micro-electro-mechanical (MEMS) empowered dynamic optical metasurface platform for dynamic polarization control with high modulation efficiencies and fast speed by leveraging the commercially available piezoelectric MEMS technique.

Original languageEnglish
Title of host publicationMETA 2023 Paris - France : The 13th International Conference on Metamaterials, Photonic Crystals and Plasmonics
Publication date2023
Pages982
Publication statusPublished - 2023
Event13th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2023 - Paris, France
Duration: 18. Jul 202321. Jul 2023

Conference

Conference13th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2023
Country/TerritoryFrance
CityParis
Period18/07/202321/07/2023
SeriesMETA Proceedings

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