Optical properties of molybdenum in the ultraviolet and extreme ultraviolet by reflection electron energy loss spectroscopy

N. Pauly*, F. Yubero, S. Tougaard

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Optical properties of polycrystalline molybdenum are determined from ultraviolet up to extreme ultraviolet by reflection electron energy loss spectroscopy (REELS). Calculations are performed within the dielectric response theory by means of the quantitative analysis of electron energy losses at surfaces QUEELS- ϵ( k, ω)-REELS software [Surf. Interface Anal.36, 824 (2004)SIANDQ0142-242110.1002/sia.1774] that allows the simulation of inelastic scattering cross sections, using a parametric energy loss function describing the optical response of the material. From this energy loss function, the real and imaginary parts of the dielectric function, the refractive index, and the extinction coefficient are deduced and compared with previously published results.

Original languageEnglish
JournalApplied Optics
Volume59
Issue number14
Pages (from-to)4527-4532
Number of pages6
ISSN1559-128X
DOIs
Publication statusPublished - 2020

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