On the Mechanism of Sputtering

Chr. Lehmann, P. Sigmund

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalIPPS physica status solidi (b)
Volume16
Issue number2
Pages (from-to)507-511
ISSN0370-1972
DOIs
Publication statusPublished - 1966
Externally publishedYes

Cite this