Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

Sajid Choudhury; Vladimir A. Zenin; Soham Saha; Vladimir M. Shalaev; Sergei Bozhevolnyi; Alexandra Boltasseva

doi:10.1364/FIO.2017.JTu2A.12

Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

Sajid Choudhury, Vladimir A. Zenin, Soham Saha, Vladimir M. Shalaev, Sergei Bozhevolnyi, Alexandra Boltasseva^*

^*Corresponding author for this work

Purdue University

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

Original language	English
Title of host publication	Frontiers in Optics 2017
Publisher	Optica Publishing Group
Publication date	2017
Article number	JTu2A.12
ISBN (Print)	9781943580330
ISBN (Electronic)	9781557528209
DOIs	https://doi.org/10.1364/FIO.2017.JTu2A.12
Publication status	Published - 2017
Event	Frontiers in Optics, FiO 2017 - Washington, United States Duration: 18. Sep 2017 → 21. Sep 2017

Conference

Conference	Frontiers in Optics, FiO 2017
Country/Territory	United States
City	Washington
Period	18/09/2017 → 21/09/2017

Documents & Links

10.1364/FIO.2017.JTu2A.12

Cite this

@inproceedings{ce07d2c4697643f1b3fb82bce5716b50,

title = "Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces",

abstract = "A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.",

author = "Sajid Choudhury and Zenin, {Vladimir A.} and Soham Saha and Shalaev, {Vladimir M.} and Sergei Bozhevolnyi and Alexandra Boltasseva",

year = "2017",

doi = "10.1364/FIO.2017.JTu2A.12",

language = "English",

isbn = "9781943580330",

booktitle = "Frontiers in Optics 2017",

publisher = "Optica Publishing Group",

address = "United States",

note = "Frontiers in Optics, FiO 2017 ; Conference date: 18-09-2017 Through 21-09-2017",

}

TY - GEN

T1 - Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

AU - Choudhury, Sajid

AU - Zenin, Vladimir A.

AU - Saha, Soham

AU - Shalaev, Vladimir M.

AU - Bozhevolnyi, Sergei

AU - Boltasseva, Alexandra

PY - 2017

Y1 - 2017

N2 - A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

AB - A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

U2 - 10.1364/FIO.2017.JTu2A.12

DO - 10.1364/FIO.2017.JTu2A.12

M3 - Article in proceedings

AN - SCOPUS:85035133439

SN - 9781943580330

BT - Frontiers in Optics 2017

PB - Optica Publishing Group

T2 - Frontiers in Optics, FiO 2017

Y2 - 18 September 2017 through 21 September 2017

ER -

Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

Abstract

Conference

Documents & Links

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