Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

Sajid Choudhury, Vladimir A. Zenin, Soham Saha, Vladimir M. Shalaev, Sergei Bozhevolnyi, Alexandra Boltasseva*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

Original languageEnglish
Title of host publicationFrontiers in Optics 2017
PublisherOptica Publishing Group
Publication date2017
Article numberJTu2A.12
ISBN (Print)9781943580330
ISBN (Electronic)9781557528209
Publication statusPublished - 2017
EventFrontiers in Optics, FiO 2017 - Washington, United States
Duration: 18. Sep 201721. Sep 2017


ConferenceFrontiers in Optics, FiO 2017
Country/TerritoryUnited States


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