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MOS properties of ultrathin oxides on silicon

  • P. Morgen
  • , T. Jensen
  • , C. Gundlach
  • , L.-B. Tækker
  • , S.V. Hoffmann
  • , Z. Li
  • , K. Pedersen

    Research output: Contribution to journal › Journal article › Research › peer-review

    Original languageEnglish
    JournalPhysica Scripta
    VolumeT101
    Pages (from-to)26-9
    ISSN0031-8949
    Publication statusPublished - 2002

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