Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method

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@article{380a07e0628811df937d000ea68e967b,

title = "Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method",

author = "Tougaard, \{Sven Mosb{\ae}k\} and H Jin and H Shinotsuka and H Yoshikawa and H Iwai and S Tanuma",

year = "2010",

doi = "10.1063/1.3346345",

language = "English",

volume = "107",

pages = "083709--1 083709--11",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method

AU - Tougaard, Sven Mosbæk

AU - Jin, H

AU - Shinotsuka, H

AU - Yoshikawa, H

AU - Iwai, H

AU - Tanuma, S

PY - 2010

Y1 - 2010

U2 - 10.1063/1.3346345

DO - 10.1063/1.3346345

M3 - Journal article

SN - 0021-8979

VL - 107

SP - 083709-1 083709-11

JO - Journal of Applied Physics

JF - Journal of Applied Physics

ER -