Measurement of optical constants of Si and SiO2 from reflection electron energy loss spectra using factor analysis method

Sven Mosbæk Tougaard, H Jin, H Shinotsuka, H Yoshikawa, H Iwai, S Tanuma

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalJournal of Applied Physics
Volume107
Pages (from-to)083709-1 083709-11
Number of pages11
ISSN0021-8979
DOIs
Publication statusPublished - 2010

Cite this