ION IMPLANTATION

S.M. Davidson; G.R. Booker; R.W. Bicknell; R.M. Allen; R.R. Hart; D.A. Marsden; J.L. Whitton; B.J. Masters; J.M. Fairfield; B.L. Crowder; R.S. Title; D.K. Brice; J.E. Westmoreland; P. Sigmund

ION IMPLANTATION

S.M. Davidson, G.R. Booker, R.W. Bicknell, R.M. Allen, R.R. Hart, D.A. Marsden, J.L. Whitton, B.J. Masters, J.M. Fairfield, B.L. Crowder, R.S. Title, D.K. Brice, J.E. Westmoreland, P. Sigmund

Department of Physics, Chemistry and Pharmacy

Research output: Contribution to conference without publisher/journal › Paper › Research › peer-review

Original language	English
Publication date	1971
Publication status	Published - 1971
Event	Int Conf on Ion Implantation in Semiconductors, 1st - Thousand Oaks, United States Duration: 4. May 1970 → 9. May 1970

Conference

Conference	Int Conf on Ion Implantation in Semiconductors, 1st
Country/Territory	United States
City	Thousand Oaks,
Period	04/05/1970 → 09/05/1970

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@conference{9ce687cc190147b6bfe7a6631316331e,

title = "ION IMPLANTATION",

author = "S.M. Davidson and G.R. Booker and R.W. Bicknell and R.M. Allen and R.R. Hart and D.A. Marsden and J.L. Whitton and B.J. Masters and J.M. Fairfield and B.L. Crowder and R.S. Title and D.K. Brice and J.E. Westmoreland and P. Sigmund",

year = "1971",

language = "English",

note = "Int Conf on Ion Implantation in Semiconductors, 1st ; Conference date: 04-05-1970 Through 09-05-1970",

}

TY - CONF

T1 - ION IMPLANTATION

AU - Davidson, S.M.

AU - Booker, G.R.

AU - Bicknell, R.W.

AU - Allen, R.M.

AU - Hart, R.R.

AU - Marsden, D.A.

AU - Whitton, J.L.

AU - Masters, B.J.

AU - Fairfield, J.M.

AU - Crowder, B.L.

AU - Title, R.S.

AU - Brice, D.K.

AU - Westmoreland, J.E.

AU - Sigmund, P.

PY - 1971

Y1 - 1971

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-0015197377&partnerID=MN8TOARS

M3 - Paper

T2 - Int Conf on Ion Implantation in Semiconductors, 1st

Y2 - 4 May 1970 through 9 May 1970

ER -

ION IMPLANTATION

Conference

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