ION IMPLANTATION

S.M. Davidson, G.R. Booker, R.W. Bicknell, R.M. Allen, R.R. Hart, D.A. Marsden, J.L. Whitton, B.J. Masters, J.M. Fairfield, B.L. Crowder, R.S. Title, D.K. Brice, J.E. Westmoreland, P. Sigmund

Research output: Contribution to conference without publisher/journalPaperResearchpeer-review

Original languageEnglish
Publication date1971
Publication statusPublished - 1971
EventInt Conf on Ion Implantation in Semiconductors, 1st - Thousand Oaks, United States
Duration: 4. May 19709. May 1970

Conference

ConferenceInt Conf on Ion Implantation in Semiconductors, 1st
Country/TerritoryUnited States
CityThousand Oaks,
Period04/05/197009/05/1970

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