Ion etching methods for depth profiling of complex three-dimensional samples in combination with scanning Auger electron microscopy

Per Morgen, Bo Henriksen, Danny Kyrping

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalZhenkong
Volume82
Issue number9
Pages (from-to)922-929
Number of pages8
ISSN1002-0322
DOIs
Publication statusPublished - 2008

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