Enhanced sputtering of solid neon by molecular ions

Ole Ellegaard, J Schou, B Stenum, H Sørensen, R Pedrys

Research output: Contribution to journal › Journal article › Research › peer-review

Translated title of the contribution	ENHANCED SPUTTERING OF SOLID NEON BY MOLECULAR-IONS
Original language	English
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	67
Issue number	1-4
Pages (from-to)	549-553
ISSN	0168-583X
DOIs	https://doi.org/10.1016/0168-583X(92)95871-N
Publication status	Published - 1. Apr 1992

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title = "Enhanced sputtering of solid neon by molecular ions",

author = "Ole Ellegaard and J Schou and B Stenum and H S{\o}rensen and R Pedrys",

note = "14TH INTERNATIONAL CONF ON ATOMIC COLLISIONS IN SOLIDS ( ICACIS-14 ), UNIV SALFORD, SALFORD, ENGLAND, JUL 28-AUG 02, 1991",

year = "1992",

month = apr,

day = "1",

doi = "10.1016/0168-583X(92)95871-N",

language = "English",

volume = "67",

pages = "549--553",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Heinemann",

number = "1-4",

}

TY - JOUR

T1 - Enhanced sputtering of solid neon by molecular ions

AU - Ellegaard, Ole

AU - Schou, J

AU - Stenum, B

AU - Sørensen, H

AU - Pedrys, R

N1 - 14TH INTERNATIONAL CONF ON ATOMIC COLLISIONS IN SOLIDS ( ICACIS-14 ), UNIV SALFORD, SALFORD, ENGLAND, JUL 28-AUG 02, 1991

PY - 1992/4/1

Y1 - 1992/4/1

U2 - 10.1016/0168-583X(92)95871-N

DO - 10.1016/0168-583X(92)95871-N

M3 - Journal article

SN - 0168-583X

VL - 67

SP - 549

EP - 553

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -