ELECTRONIC AND KNOCK-ON SPUTTERING OF SOLID RARE-GASES BY LIGHT KEV IONS

J SCHOU, Ole Ellegaard, H SORENSEN, R PEDRYS

    Research output: Contribution to journalJournal articleResearchpeer-review

    Translated title of the contributionELECTRONIC AND KNOCK-ON SPUTTERING OF SOLID RARE-GASES BY LIGHT KEV IONS
    Original languageEnglish
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume33
    Issue number1-4
    Pages (from-to)808-814
    Number of pages7
    ISSN0168-583X
    Publication statusPublished - 1. Jun 1988

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