Electromagnetic actuation in MEMS switches

Roana Melina de Oliveira Hansen, Mária Mátéfi-Tempfli, Steffen Chemnitz, Tim Reimer, Bernhard Wagner, Stefan Mátéfi-Tempfli, Wolfgang Benecke, Horst-Günter Rubahn

Research output: Contribution to conference without publisher/journalPosterResearchpeer-review

Abstract

Power electronics takes use of switches in order to convert and manage energy. The ideal switch with low power loss consists of electromechanic relays, but since they are bulky and expensive, semiconductors switches are more widely used for power electronic applications, resulting in power losses during energy conversion.
Micro-Electro-Mechanical Systems (MEMS) consist of miniaturized mechanical and/or electro-mechanical elements fabricated using microfabrication techniques, and are good candidates for achieving a miniaturized electromechanic switch at the micro-scale with very little power loss.
Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which constrains its integration through standard deposition methods.
Electroplating is a deposition technique which allows the deposition of thick films, and the integration of this technique to standard cleanroom fabrication is one of the focuses of this project, leading to large-scale fabrication of a new generation of reliable MEMS and power MEMS devices.
We have investigated deposition of these films via electroplating and its magnetic properties, along with the feasibility for integration into MEMS switches, and the results are presented in this work.
Original languageEnglish
Publication date6. Oct 2015
Publication statusPublished - 6. Oct 2015
Event100% Climate Neutrality: Solutions for Crossing Borders - Alsion, Sonderborg, Denmark
Duration: 6. Oct 20157. Oct 2015

Conference

Conference100% Climate Neutrality
LocationAlsion
CountryDenmark
CitySonderborg
Period06/10/201507/10/2015

Fingerprint

Switches
Electroplating
Power electronics
Magnetic thick films
Semiconductor switches
Fabrication
Microfabrication
Energy conversion
Thick films
Magnetic properties

Keywords

  • Technology

Cite this

Oliveira Hansen, R. M. D., Mátéfi-Tempfli, M., Chemnitz, S., Reimer, T., Wagner, B., Mátéfi-Tempfli, S., ... Rubahn, H-G. (2015). Electromagnetic actuation in MEMS switches. Poster session presented at 100% Climate Neutrality, Sonderborg, Denmark.
Oliveira Hansen, Roana Melina de ; Mátéfi-Tempfli, Mária ; Chemnitz, Steffen ; Reimer, Tim ; Wagner, Bernhard ; Mátéfi-Tempfli, Stefan ; Benecke, Wolfgang ; Rubahn, Horst-Günter. / Electromagnetic actuation in MEMS switches. Poster session presented at 100% Climate Neutrality, Sonderborg, Denmark.
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Oliveira Hansen, RMD, Mátéfi-Tempfli, M, Chemnitz, S, Reimer, T, Wagner, B, Mátéfi-Tempfli, S, Benecke, W & Rubahn, H-G 2015, 'Electromagnetic actuation in MEMS switches', 100% Climate Neutrality, Sonderborg, Denmark, 06/10/2015 - 07/10/2015.

Electromagnetic actuation in MEMS switches. / Oliveira Hansen, Roana Melina de ; Mátéfi-Tempfli, Mária; Chemnitz, Steffen; Reimer, Tim ; Wagner, Bernhard; Mátéfi-Tempfli, Stefan; Benecke, Wolfgang; Rubahn, Horst-Günter.

2015. Poster session presented at 100% Climate Neutrality, Sonderborg, Denmark.

Research output: Contribution to conference without publisher/journalPosterResearchpeer-review

TY - CONF

T1 - Electromagnetic actuation in MEMS switches

AU - Oliveira Hansen, Roana Melina de

AU - Mátéfi-Tempfli, Mária

AU - Chemnitz, Steffen

AU - Reimer, Tim

AU - Wagner, Bernhard

AU - Mátéfi-Tempfli, Stefan

AU - Benecke, Wolfgang

AU - Rubahn, Horst-Günter

PY - 2015/10/6

Y1 - 2015/10/6

N2 - Power electronics takes use of switches in order to convert and manage energy. The ideal switch with low power loss consists of electromechanic relays, but since they are bulky and expensive, semiconductors switches are more widely used for power electronic applications, resulting in power losses during energy conversion. Micro-Electro-Mechanical Systems (MEMS) consist of miniaturized mechanical and/or electro-mechanical elements fabricated using microfabrication techniques, and are good candidates for achieving a miniaturized electromechanic switch at the micro-scale with very little power loss. Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which constrains its integration through standard deposition methods. Electroplating is a deposition technique which allows the deposition of thick films, and the integration of this technique to standard cleanroom fabrication is one of the focuses of this project, leading to large-scale fabrication of a new generation of reliable MEMS and power MEMS devices. We have investigated deposition of these films via electroplating and its magnetic properties, along with the feasibility for integration into MEMS switches, and the results are presented in this work.

AB - Power electronics takes use of switches in order to convert and manage energy. The ideal switch with low power loss consists of electromechanic relays, but since they are bulky and expensive, semiconductors switches are more widely used for power electronic applications, resulting in power losses during energy conversion. Micro-Electro-Mechanical Systems (MEMS) consist of miniaturized mechanical and/or electro-mechanical elements fabricated using microfabrication techniques, and are good candidates for achieving a miniaturized electromechanic switch at the micro-scale with very little power loss. Electromagnetic actuation is a very promising approach to operate such MEMS and Power MEMS devices, due to the long range, reproducible and strong forces generated by this method, among other advantages. However, the use of electromagnetic actuation in such devices requires the use of thick magnetic films, which constrains its integration through standard deposition methods. Electroplating is a deposition technique which allows the deposition of thick films, and the integration of this technique to standard cleanroom fabrication is one of the focuses of this project, leading to large-scale fabrication of a new generation of reliable MEMS and power MEMS devices. We have investigated deposition of these films via electroplating and its magnetic properties, along with the feasibility for integration into MEMS switches, and the results are presented in this work.

KW - Technology

M3 - Poster

ER -

Oliveira Hansen RMD, Mátéfi-Tempfli M, Chemnitz S, Reimer T, Wagner B, Mátéfi-Tempfli S et al. Electromagnetic actuation in MEMS switches. 2015. Poster session presented at 100% Climate Neutrality, Sonderborg, Denmark.