Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves

C. L. C. Smith, A. H. Thilsted, C. E. Garcia-Ortiz, I. P. Radko, R. Marie, C. Jeppesen, C. Vannahme, S. I. Bozhevolnyi, A. Kristensen

Research output: Contribution to journalJournal articleResearchpeer-review


We demonstrate the highly efficient (>50%) conversion of freely propagating light to channel plasmon-polaritons (CPPs) in gold V-groove waveguides using compact 1.6 mu m long waveguide-termination coupling mirrors. Our straightforward fabrication process, involving UV-lithography and crystallographic silicon etching, forms the coupling mirrors innately and ensures exceptional-quality, wafer-scale device production. We tailor the V-shaped profiles by thermal silicon oxidation in order to shift initially wedge-located modes downward into the V-grooves, resulting in well-confined CPPs suitable for nanophotonic applications.
Original languageEnglish
JournalNano Letters
Issue number3
Pages (from-to)1659-1664
Publication statusPublished - 2014


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