Effects of gas environment on electronic and optical properties of amorphous indium zinc tin oxide thin films

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Original languageEnglish
JournalJournal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films
VolumeA31
Pages (from-to)031508-1 til 031508-7
Number of pages8
ISSN1553-1813
DOIs
Publication statusPublished - 2013

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