Dynamic piezoelectric MEMS-based optical metasurfaces

Chao Meng, Paul C.V. Thrane, Jo Gjessing, Fei Ding, Martin Thomaschewski, Cuo Wu, Christopher Dirdal, Sergey I. Bozhevolnyi*

*Corresponding author for this work

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Optical metasurfaces (OMSs) have shown unprecedented capabilities for versatile wavefront manipulations at the subwavelength scale. However, most well-established OMSs are static, featuring well-defined optical responses determined by OMS configurations set during their fabrication, whereas dynamic OMS configurations investigated so far often exhibit specific limitations and reduced reconfigurability. Here, by combining a thin-film piezoelectric microelectromechanical system (MEMS) with a gap-surface plasmon-based OMS, we develop an electrically driven dynamic MEMS-OMS platform that offers controllable phase and amplitude modulation of the reflected light by finely actuating the MEMS mirror. Using this platform, we demonstrate MEMS-OMS components for polarization-independent beam steering and two-dimensional (2D) focusing with high modulation efficiencies (~50%), broadband operation (~20% near the operating wavelength of 800 nanometers), and fast responses (<0.4 milliseconds). The developed MEMS-OMS platform offers flexible solutions for realizing complex dynamic 2D wavefront manipulations that could be used in reconfigurable and adaptive optical networks and systems.

Original languageEnglish
Article numbereabg5639
JournalScience Advances
Issue number26
Number of pages11
Publication statusPublished - Jun 2021

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Copyright © 2021 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science.


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