Distortion of depth profiles during ion bombardment II. Mixing mechanisms

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	180
Issue number	1
Pages (from-to)	211-219
ISSN	0168-9002
DOIs	https://doi.org/10.1016/0029-554x(81)90032-x
Publication status	Published - 1981

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@article{478170b99d714b6380aa07334e65650b,

title = "Distortion of depth profiles during ion bombardment II. Mixing mechanisms",

author = "A. Grasmarti and P. Sigmund",

year = "1981",

doi = "10.1016/0029-554x(81)90032-x",

language = "English",

volume = "180",

pages = "211--219",

journal = "Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",

issn = "0168-9002",

publisher = "Heinemann",

number = "1",

}

TY - JOUR

T1 - Distortion of depth profiles during ion bombardment II. Mixing mechanisms

AU - Grasmarti, A.

AU - Sigmund, P.

PY - 1981

Y1 - 1981

U2 - 10.1016/0029-554x(81)90032-x

DO - 10.1016/0029-554x(81)90032-x

M3 - Journal article

VL - 180

SP - 211

EP - 219

JO - Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

SN - 0168-9002

IS - 1

ER -