Distortion of depth profiles during ion bombardment II. Mixing mechanisms

A. Grasmarti, P. Sigmund

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume180
Issue number1
Pages (from-to)211-219
ISSN0168-9002
DOIs
Publication statusPublished - 1981

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