Dielectric and optical properties of Zr silicate thin films grown on Si(100) by atomic layer deposition

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Udgivelsesdato: 2009
Original languageEnglish
JournalJournal of Applied Physics
Volume106
Pages (from-to)0841081-0841086
Number of pages6
ISSN0021-8979
DOIs
Publication statusPublished - 1. Jan 2009

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