Composition dependence of dielectric and optical properties of Hf-Zr-silicate thin films grown on Si(100) by atomic layer deposition

Dahlang Tahir, Suhk Kun Oh, Hee Jae Kang, Sven Mosbæk Tougaard

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Original languageEnglish
JournalThin Solid Films
Volume616
Pages (from-to)425-430
ISSN0040-6090
DOIs
Publication statusPublished - 2016

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