CITATION CLASSIC - THEORY OF SPUTTERING .1. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS

TY - JOUR

T1 - CITATION CLASSIC - THEORY OF SPUTTERING .1. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS

AU - Sigmund, P.

PY - 1983/3/14

Y1 - 1983/3/14

UR - http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1983QD89800001&KeyUID=WOS:A1983QD89800001

M3 - Journal article

SP - 18

JO - Current Contents Physical Chemical and Earth Sciences

JF - Current Contents Physical Chemical and Earth Sciences

IS - 11

ER -