Alloy sputtering at high fluence: preferential sputtering and competing effects

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	82
Issue number	2
Pages (from-to)	269-282
ISSN	0168-583X
DOIs	https://doi.org/10.1016/0168-583x(93)96029-c
Publication status	Published - 1993

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@article{3b222dcee1f8438eb3c8916741b433fa,

title = "Alloy sputtering at high fluence: preferential sputtering and competing effects",

author = "P. Sigmund and A. Oliva",

year = "1993",

doi = "10.1016/0168-583x(93)96029-c",

language = "English",

volume = "82",

pages = "269--282",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Alloy sputtering at high fluence: preferential sputtering and competing effects

AU - Sigmund, P.

AU - Oliva, A.

PY - 1993

Y1 - 1993

U2 - 10.1016/0168-583x(93)96029-c

DO - 10.1016/0168-583x(93)96029-c

M3 - Journal article

SN - 0168-583X

VL - 82

SP - 269

EP - 282

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 2

ER -