| Original language | English |
|---|---|
| Journal | Journal of Vacuum Science & Technology A |
| Issue number | A 23 |
| Pages (from-to) | 741-745 |
| ISSN | 0734-2101 |
| Publication status | Published - 2005 |
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Research output: Contribution to journal › Journal article › Research › peer-review
| Original language | English |
|---|---|
| Journal | Journal of Vacuum Science & Technology A |
| Issue number | A 23 |
| Pages (from-to) | 741-745 |
| ISSN | 0734-2101 |
| Publication status | Published - 2005 |