UV-NIL replication of microlens arrays on flexible fluoropolymer substrates

Dalius Jucius*, Algirdas Lazauskas, Viktoras Grigaliūnas, Brigita Abakevičienė, Saulius Smetona, Sigitas Tamulevičius

*Kontaktforfatter for dette arbejde

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

Resumé

This paper describes application of UV-NIL technique for the fabrication of hexagonal OrmoComp microlens arrays on flexible fluoropolymer substrates having exceptional chemical resistance, stability at elevated temperatures and high transmittance in the UV, visible, and infrared regions of the spectrum. Uniform and well-defined patterns of close-packed convex microlenses were formed in OrmoComp layers on H2 plasma treated FEP and ETFE substrates by UV-NIL replication of the metalized and liquid paraffin antiadhesive coated negative OrmoComp replicas of the master mold. UV-NIL replication was successfully performed at 7.1 kPa imprint pressure and 1100 mJ/cm2 exposure dose. Optical testing confirmed good uniformity and strong focusing ability of the replicated microlenses across the entire surface of replicas. Fluoropolymer substrates are especially promising for the use in harsh environments as a cheaper and lightweight substitute for quartz and glass. Moreover, flexible substrates enable further development of the proposed technique for especially efficient roll-to-roll replication.

OriginalsprogEngelsk
TidsskriftMicrosystem Technologies
Vol/bind24
Udgave nummer2
Sider (fra-til)1115-1125
ISSN0946-7076
DOI
StatusUdgivet - 2018

Fingeraftryk

fluoropolymers
Fluorine containing polymers
Microlenses
Substrates
replicas
Optical testing
Mineral Oil
Quartz
Chemical resistance
Polytetrafluoroethylene
paraffins
Paraffins
transmittance
quartz
substitutes
Infrared radiation
Plasmas
Fabrication
Glass
dosage

Citer dette

Jucius, Dalius ; Lazauskas, Algirdas ; Grigaliūnas, Viktoras ; Abakevičienė, Brigita ; Smetona, Saulius ; Tamulevičius, Sigitas. / UV-NIL replication of microlens arrays on flexible fluoropolymer substrates. I: Microsystem Technologies. 2018 ; Bind 24, Nr. 2. s. 1115-1125.
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title = "UV-NIL replication of microlens arrays on flexible fluoropolymer substrates",
abstract = "This paper describes application of UV-NIL technique for the fabrication of hexagonal OrmoComp microlens arrays on flexible fluoropolymer substrates having exceptional chemical resistance, stability at elevated temperatures and high transmittance in the UV, visible, and infrared regions of the spectrum. Uniform and well-defined patterns of close-packed convex microlenses were formed in OrmoComp layers on H2 plasma treated FEP and ETFE substrates by UV-NIL replication of the metalized and liquid paraffin antiadhesive coated negative OrmoComp replicas of the master mold. UV-NIL replication was successfully performed at 7.1 kPa imprint pressure and 1100 mJ/cm2 exposure dose. Optical testing confirmed good uniformity and strong focusing ability of the replicated microlenses across the entire surface of replicas. Fluoropolymer substrates are especially promising for the use in harsh environments as a cheaper and lightweight substitute for quartz and glass. Moreover, flexible substrates enable further development of the proposed technique for especially efficient roll-to-roll replication.",
author = "Dalius Jucius and Algirdas Lazauskas and Viktoras Grigaliūnas and Brigita Abakevičienė and Saulius Smetona and Sigitas Tamulevičius",
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Jucius, D, Lazauskas, A, Grigaliūnas, V, Abakevičienė, B, Smetona, S & Tamulevičius, S 2018, 'UV-NIL replication of microlens arrays on flexible fluoropolymer substrates', Microsystem Technologies, bind 24, nr. 2, s. 1115-1125. https://doi.org/10.1007/s00542-017-3468-8

UV-NIL replication of microlens arrays on flexible fluoropolymer substrates. / Jucius, Dalius; Lazauskas, Algirdas; Grigaliūnas, Viktoras; Abakevičienė, Brigita; Smetona, Saulius; Tamulevičius, Sigitas.

I: Microsystem Technologies, Bind 24, Nr. 2, 2018, s. 1115-1125.

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

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AU - Jucius, Dalius

AU - Lazauskas, Algirdas

AU - Grigaliūnas, Viktoras

AU - Abakevičienė, Brigita

AU - Smetona, Saulius

AU - Tamulevičius, Sigitas

PY - 2018

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N2 - This paper describes application of UV-NIL technique for the fabrication of hexagonal OrmoComp microlens arrays on flexible fluoropolymer substrates having exceptional chemical resistance, stability at elevated temperatures and high transmittance in the UV, visible, and infrared regions of the spectrum. Uniform and well-defined patterns of close-packed convex microlenses were formed in OrmoComp layers on H2 plasma treated FEP and ETFE substrates by UV-NIL replication of the metalized and liquid paraffin antiadhesive coated negative OrmoComp replicas of the master mold. UV-NIL replication was successfully performed at 7.1 kPa imprint pressure and 1100 mJ/cm2 exposure dose. Optical testing confirmed good uniformity and strong focusing ability of the replicated microlenses across the entire surface of replicas. Fluoropolymer substrates are especially promising for the use in harsh environments as a cheaper and lightweight substitute for quartz and glass. Moreover, flexible substrates enable further development of the proposed technique for especially efficient roll-to-roll replication.

AB - This paper describes application of UV-NIL technique for the fabrication of hexagonal OrmoComp microlens arrays on flexible fluoropolymer substrates having exceptional chemical resistance, stability at elevated temperatures and high transmittance in the UV, visible, and infrared regions of the spectrum. Uniform and well-defined patterns of close-packed convex microlenses were formed in OrmoComp layers on H2 plasma treated FEP and ETFE substrates by UV-NIL replication of the metalized and liquid paraffin antiadhesive coated negative OrmoComp replicas of the master mold. UV-NIL replication was successfully performed at 7.1 kPa imprint pressure and 1100 mJ/cm2 exposure dose. Optical testing confirmed good uniformity and strong focusing ability of the replicated microlenses across the entire surface of replicas. Fluoropolymer substrates are especially promising for the use in harsh environments as a cheaper and lightweight substitute for quartz and glass. Moreover, flexible substrates enable further development of the proposed technique for especially efficient roll-to-roll replication.

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