Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids

Bidragets oversatte titel: SPUTTERING YIELDS AND ENERGY-DISTRIBUTIONS FROM NONOVERLAPPING SUBSPIKES IN ION BOMBARDED VOLATILE SOLIDS

Ole Ellegaard, J Schou, B Stenum, H Sørensen, R Pedrys

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Bidragets oversatte titel	SPUTTERING YIELDS AND ENERGY-DISTRIBUTIONS FROM NONOVERLAPPING SUBSPIKES IN ION BOMBARDED VOLATILE SOLIDS
Originalsprog	Engelsk
Tidsskrift	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Vol/bind	62
Udgave nummer	4
Sider (fra-til)	447-455
ISSN	0168-583X
DOI	https://doi.org/10.1016/0168-583X(92)95376-3
Status	Udgivet - 3. jan. 1992

Dokumenter og links

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title = "Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids",

author = "Ole Ellegaard and J Schou and B Stenum and H S{\o}rensen and R Pedrys",

year = "1992",

month = jan,

day = "3",

doi = "10.1016/0168-583X(92)95376-3",

language = "English",

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pages = "447--455",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

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Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

TY - JOUR

T1 - Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids

AU - Ellegaard, Ole

AU - Schou, J

AU - Stenum, B

AU - Sørensen, H

AU - Pedrys, R

PY - 1992/1/3

Y1 - 1992/1/3

U2 - 10.1016/0168-583X(92)95376-3

DO - 10.1016/0168-583X(92)95376-3

M3 - Journal article

SN - 0168-583X

VL - 62

SP - 447

EP - 455

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 4

ER -