Sputtering of thin metal overlayers studied by electron spectroscopy and a quartz crystal microbalance method

Jens Onsgaard, Ole Ellegaard

    Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

    OriginalsprogEngelsk
    TidsskriftNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
    Vol/bind2
    Udgave nummer1-3
    Sider (fra-til)666-669
    Antal sider4
    ISSN0168-583X
    DOI
    StatusUdgivet - 1984

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