Preferential recoil implantation in polyatomic targets

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Originalsprog	Engelsk
Tidsskrift	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Vol/bind	34
Udgave nummer	1
Sider (fra-til)	15-21
ISSN	0168-583X
DOI	https://doi.org/10.1016/0168-583x(88)90357-6
Status	Udgivet - jul. 1988

Dokumenter og links

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title = "Preferential recoil implantation in polyatomic targets",

author = "P. Sigmund",

year = "1988",

month = jul,

doi = "10.1016/0168-583x(88)90357-6",

language = "English",

volume = "34",

pages = "15--21",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Heinemann",

number = "1",

}

TY - JOUR

T1 - Preferential recoil implantation in polyatomic targets

AU - Sigmund, P.

PY - 1988/7

Y1 - 1988/7

U2 - 10.1016/0168-583x(88)90357-6

DO - 10.1016/0168-583x(88)90357-6

M3 - Journal article

VL - 34

SP - 15

EP - 21

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1

ER -