Oxidation of the surface of a thin amorphous silicon film

Ana G Silva, Kjeld Pedersen, Zheshen S Li, Per Morgen

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Dokumenter og links

@article{d2864544ba134e08a4501fbba146ea42,

title = "Oxidation of the surface of a thin amorphous silicon film",

author = "Silva, {Ana G} and Kjeld Pedersen and Li, {Zheshen S} and Per Morgen",

year = "2011",

doi = "10.1016/j.tsf.2011.04.189",

language = "English",

volume = "520",

pages = "697--699",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "2",

}