Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

Sajid Choudhury, Vladimir A. Zenin, Soham Saha, Vladimir M. Shalaev, Sergei Bozhevolnyi, Alexandra Boltasseva*

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Publikation: Kapitel i bog/rapport/konference-proceedingKonferencebidrag i proceedingsForskningpeer review

Abstrakt

A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

OriginalsprogEngelsk
TitelFrontiers in Optics 2017
ForlagOSA - The Optical Society
Publikationsdato2017
ArtikelnummerJTu2A.12
ISBN (Trykt)9781943580330
ISBN (Elektronisk)9781557528209
DOI
StatusUdgivet - 2017
BegivenhedFrontiers in Optics, FiO 2017 - Washington, USA
Varighed: 18. sep. 201721. sep. 2017

Konference

KonferenceFrontiers in Optics, FiO 2017
LandUSA
ByWashington
Periode18/09/201721/09/2017

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