Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

Sajid Choudhury; Vladimir A. Zenin; Soham Saha; Vladimir M. Shalaev; Sergei Bozhevolnyi; Alexandra Boltasseva

doi:10.1364/FIO.2017.JTu2A.12

Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

Sajid Choudhury, Vladimir A. Zenin, Soham Saha, Vladimir M. Shalaev, Sergei Bozhevolnyi, Alexandra Boltasseva^*

^*Kontaktforfatter for dette arbejde

Publikation: Kapitel i bog/rapport/konference-proceeding › Konferencebidrag i proceedings › Forskning › peer review

Abstrakt

A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

Originalsprog	Engelsk
Titel	Frontiers in Optics 2017
Forlag	OSA - The Optical Society
Publikationsdato	2017
Artikelnummer	JTu2A.12
ISBN (Trykt)	9781943580330
ISBN (Elektronisk)	9781557528209
DOI	https://doi.org/10.1364/FIO.2017.JTu2A.12
Status	Udgivet - 2017
Begivenhed	Frontiers in Optics, FiO 2017 - Washington, USA Varighed: 18. sep. 2017 → 21. sep. 2017

Konference

Konference	Frontiers in Optics, FiO 2017
Land	USA
By	Washington
Periode	18/09/2017 → 21/09/2017

Dokumenter og links

10.1364/FIO.2017.JTu2A.12

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Citationsformater

@inproceedings{ce07d2c4697643f1b3fb82bce5716b50,

title = "Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces",

abstract = "A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.",

author = "Sajid Choudhury and Zenin, {Vladimir A.} and Soham Saha and Shalaev, {Vladimir M.} and Sergei Bozhevolnyi and Alexandra Boltasseva",

year = "2017",

doi = "10.1364/FIO.2017.JTu2A.12",

language = "English",

isbn = "9781943580330",

booktitle = "Frontiers in Optics 2017",

publisher = "OSA - The Optical Society",

note = "Frontiers in Optics, FiO 2017 ; Conference date: 18-09-2017 Through 21-09-2017",

}

Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces. / Choudhury, Sajid; Zenin, Vladimir A.; Saha, Soham; Shalaev, Vladimir M.; Bozhevolnyi, Sergei; Boltasseva, Alexandra.

Frontiers in Optics 2017. OSA - The Optical Society, 2017. JTu2A.12.

Publikation: Kapitel i bog/rapport/konference-proceeding › Konferencebidrag i proceedings › Forskning › peer review

TY - GEN

T1 - Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

AU - Choudhury, Sajid

AU - Zenin, Vladimir A.

AU - Saha, Soham

AU - Shalaev, Vladimir M.

AU - Bozhevolnyi, Sergei

AU - Boltasseva, Alexandra

PY - 2017

Y1 - 2017

N2 - A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

AB - A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

U2 - 10.1364/FIO.2017.JTu2A.12

DO - 10.1364/FIO.2017.JTu2A.12

M3 - Article in proceedings

AN - SCOPUS:85035133439

SN - 9781943580330

BT - Frontiers in Optics 2017

PB - OSA - The Optical Society

T2 - Frontiers in Optics, FiO 2017

Y2 - 18 September 2017 through 21 September 2017

ER -