Novel hard mask fabrication method for hybrid plasmonic waveguide and metasurfaces

Sajid Choudhury, Vladimir A. Zenin, Soham Saha, Vladimir M. Shalaev, Sergei Bozhevolnyi, Alexandra Boltasseva*

*Kontaktforfatter

Publikation: Kapitel i bog/rapport/konference-proceedingKonferencebidrag i proceedingsForskningpeer review

Abstract

A hybrid plasmonic waveguide fabrication technique has been developed and waveguides fabricated using this technique have been demonstrated experimentally. The developed technique can be utilized for creating similar hybrid waveguide structures and metasurfaces with an array of material platforms such as transition metal nitrides and epitaxial silver.

OriginalsprogEngelsk
TitelFrontiers in Optics 2017
ForlagOptica Publishing Group
Publikationsdato2017
ArtikelnummerJTu2A.12
DOI
StatusUdgivet - 2017
BegivenhedFrontiers in Optics, FiO 2017 - Washington, USA
Varighed: 18. sep. 201721. sep. 2017

Konference

KonferenceFrontiers in Optics, FiO 2017
Land/OmrådeUSA
ByWashington
Periode18/09/201721/09/2017

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