Nonlinear transmission sputtering

Iosif S. Bitensky, Peter Sigmund

Publikation: Bidrag til tidsskriftKonferenceartikelForskning

OriginalsprogEngelsk
TidsskriftNuclear Instruments and Methods in Physics Reseach B
Vol/bind112
Udgave nummer1-4
Sider (fra-til)12-15
ISSN0168-583X
DOI
StatusUdgivet - 1996
BegivenhedNew Trends in Ion Beam Processing From Ions and Cluster Ion Beams to Engineering Issues - Strasbourg, Frankrig
Varighed: 22. maj 199526. maj 1995

Konference

KonferenceNew Trends in Ion Beam Processing From Ions and Cluster Ion Beams to Engineering Issues
LandFrankrig
ByStrasbourg
Periode22/05/199526/05/1995

Citer dette

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title = "Nonlinear transmission sputtering",
author = "Bitensky, {Iosif S.} and Peter Sigmund",
year = "1996",
doi = "10.1016/b978-0-444-82410-3.50008-4",
language = "English",
volume = "112",
pages = "12--15",
journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Heinemann",
number = "1-4",

}

Nonlinear transmission sputtering. / Bitensky, Iosif S.; Sigmund, Peter.

I: Nuclear Instruments and Methods in Physics Reseach B, Bind 112, Nr. 1-4, 1996, s. 12-15.

Publikation: Bidrag til tidsskriftKonferenceartikelForskning

TY - GEN

T1 - Nonlinear transmission sputtering

AU - Bitensky, Iosif S.

AU - Sigmund, Peter

PY - 1996

Y1 - 1996

U2 - 10.1016/b978-0-444-82410-3.50008-4

DO - 10.1016/b978-0-444-82410-3.50008-4

M3 - Conference article

VL - 112

SP - 12

EP - 15

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1-4

ER -