Molecular beam epitaxy synthesis of Si1-yCy and Si1-x-yGexCy alloys and Ge islands using an electron cyclotron resonance argonymethane plasma

Jean-Marc Baribeau, D. J. Lockwood, Jacob Balle, Stephen J. Rolfe, Geoff I. Sproule, Simone Moisa

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

OriginalsprogEngelsk
TidsskriftThin Solid Films
Vol/bind410
Sider (fra-til)61-71
Antal sider10
ISSN0040-6090
DOI
StatusUdgivet - 2002
Udgivet eksterntJa

Citer dette

Baribeau, Jean-Marc ; Lockwood, D. J. ; Balle, Jacob ; Rolfe, Stephen J. ; Sproule, Geoff I. ; Moisa, Simone. / Molecular beam epitaxy synthesis of Si1-yCy and Si1-x-yGexCy alloys and Ge islands using an electron cyclotron resonance argonymethane plasma. I: Thin Solid Films. 2002 ; Bind 410. s. 61-71.
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title = "Molecular beam epitaxy synthesis of Si1-yCy and Si1-x-yGexCy alloys and Ge islands using an electron cyclotron resonance argonymethane plasma",
author = "Jean-Marc Baribeau and Lockwood, {D. J.} and Jacob Balle and Rolfe, {Stephen J.} and Sproule, {Geoff I.} and Simone Moisa",
year = "2002",
doi = "10.1016/S0040-6090(02)00241-9",
language = "English",
volume = "410",
pages = "61--71",
journal = "Thin Solid Films",
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Molecular beam epitaxy synthesis of Si1-yCy and Si1-x-yGexCy alloys and Ge islands using an electron cyclotron resonance argonymethane plasma. / Baribeau, Jean-Marc; Lockwood, D. J.; Balle, Jacob; Rolfe, Stephen J.; Sproule, Geoff I.; Moisa, Simone.

I: Thin Solid Films, Bind 410, 2002, s. 61-71.

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

TY - JOUR

T1 - Molecular beam epitaxy synthesis of Si1-yCy and Si1-x-yGexCy alloys and Ge islands using an electron cyclotron resonance argonymethane plasma

AU - Baribeau, Jean-Marc

AU - Lockwood, D. J.

AU - Balle, Jacob

AU - Rolfe, Stephen J.

AU - Sproule, Geoff I.

AU - Moisa, Simone

PY - 2002

Y1 - 2002

U2 - 10.1016/S0040-6090(02)00241-9

DO - 10.1016/S0040-6090(02)00241-9

M3 - Journal article

VL - 410

SP - 61

EP - 71

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

ER -