Magnetic films for electromagnetic actuation in MEMS switches

Roana Melina de Oliveira Hansen, Mária Mátéfi-Tempfli, Romans Safonovs, Jost Adam, Steffen Chemnitz, Tim Reimer, Bernhard Wagner, Wolfgang Benecke, Stefan Mátéfi-Tempfli

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This paper investigates the fabrication of magnetic films via electroplating to be applied into electromagnetic actuated micro electro-mechanical systems (MEMS) switches. Cobalt and nickel films (1 µm thicknesses) were deposited on gold coated silicon substrates via electrochemical deposition. Different deposition conditions were investigated, regarding temperature and deposition voltage. The films morphologies were characterized via atomic force microscopy, while the magnetic properties of the films were characterized via vibrating sample magnetometer measurements. In order to evaluate the integration of these magnetic films into MEMS switches with low energy consumption, a mathematical model was developed and the results show that these films can be applied into efficient actuation with reduced power dissipation.

TidsskriftMicrosystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems
Udgave nummer4
Sider (fra-til)1987-1994
StatusUdgivet - apr. 2018


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