Magnetic films for electromagnetic actuation in MEMS switches

Roana Melina de  Oliveira Hansen; Mária Mátéfi-Tempfli; Romans Safonovs; Jost Adam; Steffen Chemnitz; Tim Reimer; Bernhard Wagner; Wolfgang Benecke; Stefan Mátéfi-Tempfli

doi:10.1007/s00542-017-3595-2

Magnetic films for electromagnetic actuation in MEMS switches

Roana Melina de Oliveira Hansen, Mária Mátéfi-Tempfli, Romans Safonovs, Jost Adam, Steffen Chemnitz, Tim Reimer, Bernhard Wagner, Wolfgang Benecke, Stefan Mátéfi-Tempfli

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Abstract

This paper investigates the fabrication of magnetic films via electroplating to be applied into electromagnetic actuated micro electro-mechanical systems (MEMS) switches. Cobalt and nickel films (1 µm thicknesses) were deposited on gold coated silicon substrates via electrochemical deposition. Different deposition conditions were investigated, regarding temperature and deposition voltage. The films morphologies were characterized via atomic force microscopy, while the magnetic properties of the films were characterized via vibrating sample magnetometer measurements. In order to evaluate the integration of these magnetic films into MEMS switches with low energy consumption, a mathematical model was developed and the results show that these films can be applied into efficient actuation with reduced power dissipation.

Originalsprog	Engelsk
Tidsskrift	Microsystem Technologies
Vol/bind	24
Udgave nummer	4
Sider (fra-til)	1987-1994
ISSN	0946-7076
DOI	https://doi.org/10.1007/s00542-017-3595-2
Status	Udgivet - apr. 2018

Dokumenter og links

10.1007/s00542-017-3595-2

Citationsformater

@article{f0935613a9b44b69b827249ac446b707,

title = "Magnetic films for electromagnetic actuation in MEMS switches",

abstract = "This paper investigates the fabrication of magnetic films via electroplating to be applied into electromagnetic actuated micro electro-mechanical systems (MEMS) switches. Cobalt and nickel films (1 µm thicknesses) were deposited on gold coated silicon substrates via electrochemical deposition. Different deposition conditions were investigated, regarding temperature and deposition voltage. The films morphologies were characterized via atomic force microscopy, while the magnetic properties of the films were characterized via vibrating sample magnetometer measurements. In order to evaluate the integration of these magnetic films into MEMS switches with low energy consumption, a mathematical model was developed and the results show that these films can be applied into efficient actuation with reduced power dissipation.",

author = "{Oliveira Hansen}, {Roana Melina de} and M{\'a}ria M{\'a}t{\'e}fi-Tempfli and Romans Safonovs and Jost Adam and Steffen Chemnitz and Tim Reimer and Bernhard Wagner and Wolfgang Benecke and Stefan M{\'a}t{\'e}fi-Tempfli",

year = "2018",

month = apr,

doi = "10.1007/s00542-017-3595-2",

language = "English",

volume = "24",

pages = "1987--1994",

journal = "Microsystem Technologies",

issn = "0946-7076",

publisher = "Springer",

number = "4",

}

TY - JOUR

T1 - Magnetic films for electromagnetic actuation in MEMS switches

AU - Oliveira Hansen, Roana Melina de

AU - Mátéfi-Tempfli, Mária

AU - Safonovs, Romans

AU - Adam, Jost

AU - Chemnitz, Steffen

AU - Reimer, Tim

AU - Wagner, Bernhard

AU - Benecke, Wolfgang

AU - Mátéfi-Tempfli, Stefan

PY - 2018/4

Y1 - 2018/4

N2 - This paper investigates the fabrication of magnetic films via electroplating to be applied into electromagnetic actuated micro electro-mechanical systems (MEMS) switches. Cobalt and nickel films (1 µm thicknesses) were deposited on gold coated silicon substrates via electrochemical deposition. Different deposition conditions were investigated, regarding temperature and deposition voltage. The films morphologies were characterized via atomic force microscopy, while the magnetic properties of the films were characterized via vibrating sample magnetometer measurements. In order to evaluate the integration of these magnetic films into MEMS switches with low energy consumption, a mathematical model was developed and the results show that these films can be applied into efficient actuation with reduced power dissipation.

AB - This paper investigates the fabrication of magnetic films via electroplating to be applied into electromagnetic actuated micro electro-mechanical systems (MEMS) switches. Cobalt and nickel films (1 µm thicknesses) were deposited on gold coated silicon substrates via electrochemical deposition. Different deposition conditions were investigated, regarding temperature and deposition voltage. The films morphologies were characterized via atomic force microscopy, while the magnetic properties of the films were characterized via vibrating sample magnetometer measurements. In order to evaluate the integration of these magnetic films into MEMS switches with low energy consumption, a mathematical model was developed and the results show that these films can be applied into efficient actuation with reduced power dissipation.

U2 - 10.1007/s00542-017-3595-2

DO - 10.1007/s00542-017-3595-2

M3 - Journal article

SN - 0946-7076

VL - 24

SP - 1987

EP - 1994

JO - Microsystem Technologies

JF - Microsystem Technologies

IS - 4

ER -

Magnetic films for electromagnetic actuation in MEMS switches

Abstract

Dokumenter og links

Fingeraftryk

Citationsformater