ION IMPLANTATION

S.M. Davidson; G.R. Booker; R.W. Bicknell; R.M. Allen; R.R. Hart; D.A. Marsden; J.L. Whitton; B.J. Masters; J.M. Fairfield; B.L. Crowder; R.S. Title; D.K. Brice; J.E. Westmoreland; P. Sigmund

ION IMPLANTATION

S.M. Davidson, G.R. Booker, R.W. Bicknell, R.M. Allen, R.R. Hart, D.A. Marsden, J.L. Whitton, B.J. Masters, J.M. Fairfield, B.L. Crowder, R.S. Title, D.K. Brice, J.E. Westmoreland, P. Sigmund

Institut for Fysik, Kemi og Farmaci

Publikation: Konferencebidrag uden forlag/tidsskrift › Paper › Forskning › peer review

Originalsprog	Engelsk
Publikationsdato	1971
Status	Udgivet - 1971
Begivenhed	Int Conf on Ion Implantation in Semiconductors, 1st - Thousand Oaks, USA Varighed: 4. maj 1970 → 9. maj 1970

Konference

Konference	Int Conf on Ion Implantation in Semiconductors, 1st
Land/Område	USA
By	Thousand Oaks,
Periode	04/05/1970 → 09/05/1970

SDU link

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Andre filer og links

http://www.scopus.com/inward/record.url?eid=2-s2.0-0015197377&partnerID=MN8TOARS

Citationsformater

@conference{9ce687cc190147b6bfe7a6631316331e,

title = "ION IMPLANTATION",

author = "S.M. Davidson and G.R. Booker and R.W. Bicknell and R.M. Allen and R.R. Hart and D.A. Marsden and J.L. Whitton and B.J. Masters and J.M. Fairfield and B.L. Crowder and R.S. Title and D.K. Brice and J.E. Westmoreland and P. Sigmund",

year = "1971",

language = "English",

note = "Int Conf on Ion Implantation in Semiconductors, 1st ; Conference date: 04-05-1970 Through 09-05-1970",

}

TY - CONF

T1 - ION IMPLANTATION

AU - Davidson, S.M.

AU - Booker, G.R.

AU - Bicknell, R.W.

AU - Allen, R.M.

AU - Hart, R.R.

AU - Marsden, D.A.

AU - Whitton, J.L.

AU - Masters, B.J.

AU - Fairfield, J.M.

AU - Crowder, B.L.

AU - Title, R.S.

AU - Brice, D.K.

AU - Westmoreland, J.E.

AU - Sigmund, P.

PY - 1971

Y1 - 1971

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-0015197377&partnerID=MN8TOARS

M3 - Paper

T2 - Int Conf on Ion Implantation in Semiconductors, 1st

Y2 - 4 May 1970 through 9 May 1970

ER -