High-efficiency silicon metasurface mirror on a sapphire substrate

Mariia Matiushechkina*, Andrey B. Evlyukhin, Vladimir A. Zenin, Michèle Heurs, Boris N. Chichkov


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For a possible implementation of high-efficiency Si-nanosphere metasurface mirrors functioning at telecom wavelengths in future gravitational wave detectors, exact dimensional and configuration parameters of the total system, including substrate and protective coating, have to be determined a priori. The reflectivity of such multi-layer metasurfaces with embedded Si nanoparticles and their potential limitations need to be investigated. Here we present the results on how the substrate and protective layer influence optical properties and demonstrate how dimensional and material characteristics of the structure alter light reflectivity. Additionally, we consider the impact of manufacturing imperfections, such as fluctuations of Si nanoparticle sizes and their exact placement, on the metasurface reflectivity. Finally, we demonstrate how high reflectivity of the system can be preserved under variations of the protective layer thickness, incident angle of light, and its polarization.

TidsskriftOptical Materials
Antal sider7
StatusUdgivet - apr. 2023

Bibliografisk note

Funding Information:
Deutsche Forschungsgemeinschaft (DFG), Germany (EXC 2122, Project ID 390833453 ) and (EXC 2123, Project ID 390837967 ), Villum Fonden, Denmark (Grant No. 40707 ).

Funding Information:
Authors acknowledge financial support from the Deutsche Forschungsgemeinschaft, Germany (DFG, German Research Foundation) under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453 ) and the Cluster of Excellence QuantumFrontiers (EXC 2123, Project ID 390837967 ).V.A.Z. acknowledges financial support from Villum Fonden, Denmark (Grant No. 40707 ).

Publisher Copyright:
© 2023 The Authors


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