Growth of ultrathin silicon nitride on Si (111) at low temperatures

Ali Bahari, U. Robenhagen, Per Morgen

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Citationsformater

@article{a5fe3690dded11db9628000ea68e967b,

title = "Growth of ultrathin silicon nitride on Si (111) at low temperatures",

author = "Ali Bahari and U. Robenhagen and Per Morgen",

year = "2005",

language = "English",

volume = "B 72",

pages = "205323--205329",

journal = "Physical Review B",

issn = "2469-9950",

publisher = "American Physical Society",

}