Giant negative piezoresistive effect in diamond-like carbon and diamond-like carbon-based nickel nanocomposite films deposited by reactive magnetron sputtering of ni target

Šarunas Meškinis, Rimantas Gudaitis, Kęstutis Šlapikas, Andrius Vasiliauskas, Arvydas Čiegis, Tomas Tamulevičius, Mindaugas Andrulevičius, Sigitas Tamulevičius

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

Resumé

Piezoresistive properties of hydrogenated diamond-like carbon (DLC) and DLC-based nickel nanocomposite (DLC:Ni) films were studied in the range of low concentration of nickel nanoparticles. The films were deposited by reactive high power pulsed magnetron sputtering (HIPIMS) of Ni target, and some samples were deposited by direct current (dc) reactive magnetron sputtering for comparison purposes. Raman scattering spectroscopy, energy-dispersive X-ray spectrometry (EDS), and X-ray photoelectron spectroscopy (XPS) were used to study the structure and chemical composition of the films. A four-point bending test was applied to study piezoresistive properties of the films. For some samples containing less than 4 at. % Ni and for the samples containing no Ni (as defined by both EDS and XPS), a giant negative piezoresistive effect was observed. The giant negative piezoresistive effect in DLC films deposited by either reactive HIPIMS or dc magnetron sputtering of Ni target was explained by possible clustering of the sp2-bonded carbon and/or formation of areas with the decreased hydrogen content. It was suggested that the tensile stress-induced rearrangements of these conglomerations have resulted in the increased conductivity paths.

OriginalsprogEngelsk
TidsskriftA C S Applied Materials and Interfaces
Vol/bind10
Udgave nummer18
Sider (fra-til)15778-15785
ISSN1944-8244
DOI
StatusUdgivet - 9. maj 2018

Fingeraftryk

Diamond
Nanocomposite films
Reactive sputtering
Nickel
Magnetron sputtering
Diamonds
Carbon
Energy dispersive spectroscopy
X ray photoelectron spectroscopy
Diamond like carbon films
Bending tests
Tensile stress
Raman scattering
Hydrogen
Spectroscopy
Nanoparticles
Chemical analysis

Citer dette

Meškinis, Šarunas ; Gudaitis, Rimantas ; Šlapikas, Kęstutis ; Vasiliauskas, Andrius ; Čiegis, Arvydas ; Tamulevičius, Tomas ; Andrulevičius, Mindaugas ; Tamulevičius, Sigitas. / Giant negative piezoresistive effect in diamond-like carbon and diamond-like carbon-based nickel nanocomposite films deposited by reactive magnetron sputtering of ni target. I: A C S Applied Materials and Interfaces. 2018 ; Bind 10, Nr. 18. s. 15778-15785.
@article{d6bc8cbb25424d1b8a09afa7842220bd,
title = "Giant negative piezoresistive effect in diamond-like carbon and diamond-like carbon-based nickel nanocomposite films deposited by reactive magnetron sputtering of ni target",
abstract = "Piezoresistive properties of hydrogenated diamond-like carbon (DLC) and DLC-based nickel nanocomposite (DLC:Ni) films were studied in the range of low concentration of nickel nanoparticles. The films were deposited by reactive high power pulsed magnetron sputtering (HIPIMS) of Ni target, and some samples were deposited by direct current (dc) reactive magnetron sputtering for comparison purposes. Raman scattering spectroscopy, energy-dispersive X-ray spectrometry (EDS), and X-ray photoelectron spectroscopy (XPS) were used to study the structure and chemical composition of the films. A four-point bending test was applied to study piezoresistive properties of the films. For some samples containing less than 4 at. {\%} Ni and for the samples containing no Ni (as defined by both EDS and XPS), a giant negative piezoresistive effect was observed. The giant negative piezoresistive effect in DLC films deposited by either reactive HIPIMS or dc magnetron sputtering of Ni target was explained by possible clustering of the sp2-bonded carbon and/or formation of areas with the decreased hydrogen content. It was suggested that the tensile stress-induced rearrangements of these conglomerations have resulted in the increased conductivity paths.",
keywords = "EDS, Raman scattering, X-ray photoelectron spectroscopy, diamond-like carbon-containing Ni, giant negative piezoresistive effect, hydrogenated diamond-like carbon",
author = "Šarunas Meškinis and Rimantas Gudaitis and Kęstutis Šlapikas and Andrius Vasiliauskas and Arvydas Čiegis and Tomas Tamulevičius and Mindaugas Andrulevičius and Sigitas Tamulevičius",
year = "2018",
month = "5",
day = "9",
doi = "10.1021/acsami.7b17439",
language = "English",
volume = "10",
pages = "15778--15785",
journal = "A C S Applied Materials and Interfaces",
issn = "1944-8244",
publisher = "American Chemical Society",
number = "18",

}

Giant negative piezoresistive effect in diamond-like carbon and diamond-like carbon-based nickel nanocomposite films deposited by reactive magnetron sputtering of ni target. / Meškinis, Šarunas; Gudaitis, Rimantas; Šlapikas, Kęstutis; Vasiliauskas, Andrius; Čiegis, Arvydas; Tamulevičius, Tomas; Andrulevičius, Mindaugas; Tamulevičius, Sigitas.

I: A C S Applied Materials and Interfaces, Bind 10, Nr. 18, 09.05.2018, s. 15778-15785.

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

TY - JOUR

T1 - Giant negative piezoresistive effect in diamond-like carbon and diamond-like carbon-based nickel nanocomposite films deposited by reactive magnetron sputtering of ni target

AU - Meškinis, Šarunas

AU - Gudaitis, Rimantas

AU - Šlapikas, Kęstutis

AU - Vasiliauskas, Andrius

AU - Čiegis, Arvydas

AU - Tamulevičius, Tomas

AU - Andrulevičius, Mindaugas

AU - Tamulevičius, Sigitas

PY - 2018/5/9

Y1 - 2018/5/9

N2 - Piezoresistive properties of hydrogenated diamond-like carbon (DLC) and DLC-based nickel nanocomposite (DLC:Ni) films were studied in the range of low concentration of nickel nanoparticles. The films were deposited by reactive high power pulsed magnetron sputtering (HIPIMS) of Ni target, and some samples were deposited by direct current (dc) reactive magnetron sputtering for comparison purposes. Raman scattering spectroscopy, energy-dispersive X-ray spectrometry (EDS), and X-ray photoelectron spectroscopy (XPS) were used to study the structure and chemical composition of the films. A four-point bending test was applied to study piezoresistive properties of the films. For some samples containing less than 4 at. % Ni and for the samples containing no Ni (as defined by both EDS and XPS), a giant negative piezoresistive effect was observed. The giant negative piezoresistive effect in DLC films deposited by either reactive HIPIMS or dc magnetron sputtering of Ni target was explained by possible clustering of the sp2-bonded carbon and/or formation of areas with the decreased hydrogen content. It was suggested that the tensile stress-induced rearrangements of these conglomerations have resulted in the increased conductivity paths.

AB - Piezoresistive properties of hydrogenated diamond-like carbon (DLC) and DLC-based nickel nanocomposite (DLC:Ni) films were studied in the range of low concentration of nickel nanoparticles. The films were deposited by reactive high power pulsed magnetron sputtering (HIPIMS) of Ni target, and some samples were deposited by direct current (dc) reactive magnetron sputtering for comparison purposes. Raman scattering spectroscopy, energy-dispersive X-ray spectrometry (EDS), and X-ray photoelectron spectroscopy (XPS) were used to study the structure and chemical composition of the films. A four-point bending test was applied to study piezoresistive properties of the films. For some samples containing less than 4 at. % Ni and for the samples containing no Ni (as defined by both EDS and XPS), a giant negative piezoresistive effect was observed. The giant negative piezoresistive effect in DLC films deposited by either reactive HIPIMS or dc magnetron sputtering of Ni target was explained by possible clustering of the sp2-bonded carbon and/or formation of areas with the decreased hydrogen content. It was suggested that the tensile stress-induced rearrangements of these conglomerations have resulted in the increased conductivity paths.

KW - EDS

KW - Raman scattering

KW - X-ray photoelectron spectroscopy

KW - diamond-like carbon-containing Ni

KW - giant negative piezoresistive effect

KW - hydrogenated diamond-like carbon

U2 - 10.1021/acsami.7b17439

DO - 10.1021/acsami.7b17439

M3 - Journal article

VL - 10

SP - 15778

EP - 15785

JO - A C S Applied Materials and Interfaces

JF - A C S Applied Materials and Interfaces

SN - 1944-8244

IS - 18

ER -