Full-range birefringence control with piezoelectric MEMS-based metasurfaces

Chao Meng, Paul C.V. Thrane, Fei Ding*, Sergey I. Bozhevolnyi


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Dynamic polarization control is crucial for emerging highly integrated photonic systems with diverse metasurfaces being explored for its realization, but efficient, fast, and broadband operation remains a cumbersome challenge. While efficient optical metasurfaces (OMSs) involving liquid crystals suffer from inherently slow responses, other OMS realizations are limited either in the operating wavelength range (due to resonances involved) or in the range of birefringence tuning. Capitalizing on our development of piezoelectric micro-electro-mechanical system (MEMS) based dynamic OMSs, we demonstrate reflective MEMS-OMS dynamic wave plates (DWPs) with high polarization conversion efficiencies (∼75%), broadband operation (∼100 nm near the operating wavelength of 800 nm), fast responses (<0.4 milliseconds) and full-range birefringence control that enables completely encircling the Poincaré sphere along trajectories determined by the incident light polarization and DWP orientation. Demonstrated complete electrical control over light polarization opens new avenues in further integration and miniaturization of optical networks and systems.

TidsskriftNature Communications
Udgave nummer1
Antal sider7
StatusUdgivet - 19. apr. 2022

Bibliografisk note

Funding Information:
This research has received funding from the VKR Foundation (Award in Technical and Natural Sciences 2019, S.I.B. and Grant No. 37372, F.D.); the EU Horizon 2020 research and innovation program (Marie Skłodowska-Curie grant agreement No. 713694, C.M.); as well as from the Research Council of Norway (Project number 323322, P.C.V.T.). C.M. acknowledges Yao Xiao for the help in figure preparation, Ying Qu and Martin Thomaschewski for their help in the experiments. P.T. acknowledges Jon Vedum for helping with the control electronics for the MEMS mirrors.

Publisher Copyright:
© 2022, The Author(s).


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