Abstract
We demonstrate the highly efficient (>50%) conversion of freely propagating light to channel plasmon-polaritons (CPPs) in gold V-groove waveguides using compact 1.6 mu m long waveguide-termination coupling mirrors. Our straightforward fabrication process, involving UV-lithography and crystallographic silicon etching, forms the coupling mirrors innately and ensures exceptional-quality, wafer-scale device production. We tailor the V-shaped profiles by thermal silicon oxidation in order to shift initially wedge-located modes downward into the V-grooves, resulting in well-confined CPPs suitable for nanophotonic applications.
Originalsprog | Engelsk |
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Tidsskrift | Nano Letters |
Vol/bind | 14 |
Udgave nummer | 3 |
Sider (fra-til) | 1659-1664 |
ISSN | 1530-6984 |
DOI | |
Status | Udgivet - 2014 |