Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves

C. L. C. Smith, A. H. Thilsted, C. E. Garcia-Ortiz, I. P. Radko, R. Marie, C. Jeppesen, C. Vannahme, S. I. Bozhevolnyi, A. Kristensen

Publikation: Bidrag til tidsskriftLetterForskningpeer review

Resumé

We demonstrate the highly efficient (>50%) conversion of freely propagating light to channel plasmon-polaritons (CPPs) in gold V-groove waveguides using compact 1.6 mu m long waveguide-termination coupling mirrors. Our straightforward fabrication process, involving UV-lithography and crystallographic silicon etching, forms the coupling mirrors innately and ensures exceptional-quality, wafer-scale device production. We tailor the V-shaped profiles by thermal silicon oxidation in order to shift initially wedge-located modes downward into the V-grooves, resulting in well-confined CPPs suitable for nanophotonic applications.
OriginalsprogEngelsk
TidsskriftNano Letters
Vol/bind14
Udgave nummer3
Sider (fra-til)1659-1664
ISSN1530-6984
DOI
StatusUdgivet - 2014

Fingeraftryk

V grooves
Plasmons
Silicon
plasmons
polaritons
Lithography
Waveguides
lithography
mirrors
waveguides
Nanophotonics
silicon
Gold
wedges
excitation
Etching
etching
wafers
gold
Fabrication

Citer dette

Smith, C. L. C., Thilsted, A. H., Garcia-Ortiz, C. E., Radko, I. P., Marie, R., Jeppesen, C., ... Kristensen, A. (2014). Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves. Nano Letters, 14(3), 1659-1664. https://doi.org/10.1021/nl5002058
Smith, C. L. C. ; Thilsted, A. H. ; Garcia-Ortiz, C. E. ; Radko, I. P. ; Marie, R. ; Jeppesen, C. ; Vannahme, C. ; Bozhevolnyi, S. I. ; Kristensen, A. / Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves. I: Nano Letters. 2014 ; Bind 14, Nr. 3. s. 1659-1664.
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title = "Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves",
abstract = "We demonstrate the highly efficient (>50{\%}) conversion of freely propagating light to channel plasmon-polaritons (CPPs) in gold V-groove waveguides using compact 1.6 mu m long waveguide-termination coupling mirrors. Our straightforward fabrication process, involving UV-lithography and crystallographic silicon etching, forms the coupling mirrors innately and ensures exceptional-quality, wafer-scale device production. We tailor the V-shaped profiles by thermal silicon oxidation in order to shift initially wedge-located modes downward into the V-grooves, resulting in well-confined CPPs suitable for nanophotonic applications.",
author = "Smith, {C. L. C.} and Thilsted, {A. H.} and Garcia-Ortiz, {C. E.} and Radko, {I. P.} and R. Marie and C. Jeppesen and C. Vannahme and Bozhevolnyi, {S. I.} and A. Kristensen",
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Smith, CLC, Thilsted, AH, Garcia-Ortiz, CE, Radko, IP, Marie, R, Jeppesen, C, Vannahme, C, Bozhevolnyi, SI & Kristensen, A 2014, 'Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves', Nano Letters, bind 14, nr. 3, s. 1659-1664. https://doi.org/10.1021/nl5002058

Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves. / Smith, C. L. C.; Thilsted, A. H.; Garcia-Ortiz, C. E.; Radko, I. P.; Marie, R.; Jeppesen, C.; Vannahme, C.; Bozhevolnyi, S. I.; Kristensen, A.

I: Nano Letters, Bind 14, Nr. 3, 2014, s. 1659-1664.

Publikation: Bidrag til tidsskriftLetterForskningpeer review

TY - JOUR

T1 - Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves

AU - Smith, C. L. C.

AU - Thilsted, A. H.

AU - Garcia-Ortiz, C. E.

AU - Radko, I. P.

AU - Marie, R.

AU - Jeppesen, C.

AU - Vannahme, C.

AU - Bozhevolnyi, S. I.

AU - Kristensen, A.

PY - 2014

Y1 - 2014

N2 - We demonstrate the highly efficient (>50%) conversion of freely propagating light to channel plasmon-polaritons (CPPs) in gold V-groove waveguides using compact 1.6 mu m long waveguide-termination coupling mirrors. Our straightforward fabrication process, involving UV-lithography and crystallographic silicon etching, forms the coupling mirrors innately and ensures exceptional-quality, wafer-scale device production. We tailor the V-shaped profiles by thermal silicon oxidation in order to shift initially wedge-located modes downward into the V-grooves, resulting in well-confined CPPs suitable for nanophotonic applications.

AB - We demonstrate the highly efficient (>50%) conversion of freely propagating light to channel plasmon-polaritons (CPPs) in gold V-groove waveguides using compact 1.6 mu m long waveguide-termination coupling mirrors. Our straightforward fabrication process, involving UV-lithography and crystallographic silicon etching, forms the coupling mirrors innately and ensures exceptional-quality, wafer-scale device production. We tailor the V-shaped profiles by thermal silicon oxidation in order to shift initially wedge-located modes downward into the V-grooves, resulting in well-confined CPPs suitable for nanophotonic applications.

U2 - 10.1021/nl5002058

DO - 10.1021/nl5002058

M3 - Letter

VL - 14

SP - 1659

EP - 1664

JO - Nano Letters

JF - Nano Letters

SN - 1530-6984

IS - 3

ER -

Smith CLC, Thilsted AH, Garcia-Ortiz CE, Radko IP, Marie R, Jeppesen C et al. Efficient Excitation of Channel Plasmons in Tailored, UV-Lithography-Defined V-Grooves. Nano Letters. 2014;14(3):1659-1664. https://doi.org/10.1021/nl5002058