Dynamic piezoelectric MEMS-based optical metasurfaces

Chao Meng, Paul C.V. Thrane, Jo Gjessing, Fei Ding, Martin Thomaschewski, Cuo Wu, Christopher Dirdal, Sergey I. Bozhevolnyi*

*Kontaktforfatter for dette arbejde

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Optical metasurfaces (OMSs) have shown unprecedented capabilities for versatile wavefront manipulations at the subwavelength scale. However, most well-established OMSs are static, featuring well-defined optical responses determined by OMS configurations set during their fabrication, whereas dynamic OMS configurations investigated so far often exhibit specific limitations and reduced reconfigurability. Here, by combining a thin-film piezoelectric microelectromechanical system (MEMS) with a gap-surface plasmon-based OMS, we develop an electrically driven dynamic MEMS-OMS platform that offers controllable phase and amplitude modulation of the reflected light by finely actuating the MEMS mirror. Using this platform, we demonstrate MEMS-OMS components for polarization-independent beam steering and two-dimensional (2D) focusing with high modulation efficiencies (~50%), broadband operation (~20% near the operating wavelength of 800 nanometers), and fast responses (<0.4 milliseconds). The developed MEMS-OMS platform offers flexible solutions for realizing complex dynamic 2D wavefront manipulations that could be used in reconfigurable and adaptive optical networks and systems.

TidsskriftScience Advances
Udgave nummer26
Antal sider11
StatusUdgivet - jun. 2021

Bibliografisk note

Funding Information:
This project has received funding from the ATTRACT project funded by the EC under grant agreement 777222, the University of Southern Denmark (SDU2020 funding), the VKR Foundation (Award in Technical and Natural Sciences 2019 and grant nos. 00022988 and 37372), and the EU Horizon 2020 research and innovation program (the Marie Sk?odowska-Curie grant agreement no. 713694).

Publisher Copyright:
Copyright © 2021 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science.


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