Distortion of depth profiles during sputtering. I. General description of collisional mixing

P. Sigmund, A. Gras-Marti

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Originalsprog	Engelsk
Tidsskrift	Nuclear Instruments and Methods
Vol/bind	168
Udgave nummer	1-3
Sider (fra-til)	389-394
DOI	https://doi.org/10.1016/0029-554X(80)91281-1
Status	Udgivet - 1980

Dokumenter og links

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title = "Distortion of depth profiles during sputtering. I. General description of collisional mixing",

author = "P. Sigmund and A. Gras-Marti",

year = "1980",

doi = "10.1016/0029-554X(80)91281-1",

language = "English",

volume = "168",

pages = "389--394",

journal = "Nuclear Instruments and Methods",

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TY - JOUR

T1 - Distortion of depth profiles during sputtering. I. General description of collisional mixing

AU - Sigmund, P.

AU - Gras-Marti, A.

PY - 1980

Y1 - 1980

U2 - 10.1016/0029-554X(80)91281-1

DO - 10.1016/0029-554X(80)91281-1

M3 - Journal article

VL - 168

SP - 389

EP - 394

JO - Nuclear Instruments and Methods

JF - Nuclear Instruments and Methods

IS - 1-3

ER -