Diamond like carbon films with embedded Cu nanoclusters deposited by reactive high power impulse magnetron sputtering: pulse length effects

Meškinis*, A. Vasiliauskas, M. Andrulevičius, A. Jurkevičiūtė, D. Peckus, S. Tamulevičius

*Kontaktforfatter for dette arbejde

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

Resumé

In the present study diamond like carbon films with embedded Cu nanoclusters (DLC:Cu films) were deposited by reactive high power impulse magnetron sputtering (HIPIMS). HIPIMS pulse length (pulse on time) effects were considered. The dependence of the chemical composition on pulse length was found. Structure of diamond like carbon matrix of the nanocomposite films studied by Raman scattering spectroscopy has indicated weak increase of the sp 3 /sp 2 carbon bond ratio with HIPIMS pulse length. Studies of the shape and dimensions of copper nanoclusters performed by He ion microscopy have shown that increase of the HIPIMS pulse on time resulted in increased number of the nanoclusters and subsequent increase of the Cu nanoclusters size. Study of optical properties revealed surface plasmon resonance effect in all investigated films. Correlation between the optical absorption spectra and photoexcited charge carrier relaxation time recorded by the pump probe spectroscopy was found. The highest relaxation time was observed at the excitation wavelength close to the absorption surface plasmon resonance peak wavelength The highest maximum relaxation time was observed for the DLC:Cu film deposited by using HIPIMS pulse of 400 μs on time. It was explained by the dependence of the relaxation time on Cu nanocluster size.

OriginalsprogEngelsk
TidsskriftThin Solid Films
Vol/bind673
Sider (fra-til)1-6
ISSN0040-6090
DOI
StatusUdgivet - 1. mar. 2019

Fingeraftryk

Diamond like carbon films
Nanoclusters
nanoclusters
Magnetron sputtering
impulses
magnetron sputtering
Relaxation time
diamonds
carbon
pulses
relaxation time
Surface plasmon resonance
surface plasmon resonance
Carbon
Spectroscopy
Wavelength
Diamond
Nanocomposite films
Charge carriers
Light absorption

Citer dette

Meškinis ; Vasiliauskas, A. ; Andrulevičius, M. ; Jurkevičiūtė, A. ; Peckus, D. ; Tamulevičius, S. / Diamond like carbon films with embedded Cu nanoclusters deposited by reactive high power impulse magnetron sputtering : pulse length effects. I: Thin Solid Films. 2019 ; Bind 673. s. 1-6.
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title = "Diamond like carbon films with embedded Cu nanoclusters deposited by reactive high power impulse magnetron sputtering: pulse length effects",
abstract = "In the present study diamond like carbon films with embedded Cu nanoclusters (DLC:Cu films) were deposited by reactive high power impulse magnetron sputtering (HIPIMS). HIPIMS pulse length (pulse on time) effects were considered. The dependence of the chemical composition on pulse length was found. Structure of diamond like carbon matrix of the nanocomposite films studied by Raman scattering spectroscopy has indicated weak increase of the sp 3 /sp 2 carbon bond ratio with HIPIMS pulse length. Studies of the shape and dimensions of copper nanoclusters performed by He ion microscopy have shown that increase of the HIPIMS pulse on time resulted in increased number of the nanoclusters and subsequent increase of the Cu nanoclusters size. Study of optical properties revealed surface plasmon resonance effect in all investigated films. Correlation between the optical absorption spectra and photoexcited charge carrier relaxation time recorded by the pump probe spectroscopy was found. The highest relaxation time was observed at the excitation wavelength close to the absorption surface plasmon resonance peak wavelength The highest maximum relaxation time was observed for the DLC:Cu film deposited by using HIPIMS pulse of 400 μs on time. It was explained by the dependence of the relaxation time on Cu nanocluster size.",
keywords = "Copper, Diamond-like carbon, High-power pulsed magnetron sputtering, Nanoclusters, Optical properties, Pulse length, Structure, X-ray photoelectron spectroscopy",
author = "Meškinis and A. Vasiliauskas and M. Andrulevičius and A. Jurkevičiūtė and D. Peckus and S. Tamulevičius",
year = "2019",
month = "3",
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Diamond like carbon films with embedded Cu nanoclusters deposited by reactive high power impulse magnetron sputtering : pulse length effects. / Meškinis; Vasiliauskas, A.; Andrulevičius, M.; Jurkevičiūtė, A.; Peckus, D.; Tamulevičius, S.

I: Thin Solid Films, Bind 673, 01.03.2019, s. 1-6.

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

TY - JOUR

T1 - Diamond like carbon films with embedded Cu nanoclusters deposited by reactive high power impulse magnetron sputtering

T2 - pulse length effects

AU - Meškinis,

AU - Vasiliauskas, A.

AU - Andrulevičius, M.

AU - Jurkevičiūtė, A.

AU - Peckus, D.

AU - Tamulevičius, S.

PY - 2019/3/1

Y1 - 2019/3/1

N2 - In the present study diamond like carbon films with embedded Cu nanoclusters (DLC:Cu films) were deposited by reactive high power impulse magnetron sputtering (HIPIMS). HIPIMS pulse length (pulse on time) effects were considered. The dependence of the chemical composition on pulse length was found. Structure of diamond like carbon matrix of the nanocomposite films studied by Raman scattering spectroscopy has indicated weak increase of the sp 3 /sp 2 carbon bond ratio with HIPIMS pulse length. Studies of the shape and dimensions of copper nanoclusters performed by He ion microscopy have shown that increase of the HIPIMS pulse on time resulted in increased number of the nanoclusters and subsequent increase of the Cu nanoclusters size. Study of optical properties revealed surface plasmon resonance effect in all investigated films. Correlation between the optical absorption spectra and photoexcited charge carrier relaxation time recorded by the pump probe spectroscopy was found. The highest relaxation time was observed at the excitation wavelength close to the absorption surface plasmon resonance peak wavelength The highest maximum relaxation time was observed for the DLC:Cu film deposited by using HIPIMS pulse of 400 μs on time. It was explained by the dependence of the relaxation time on Cu nanocluster size.

AB - In the present study diamond like carbon films with embedded Cu nanoclusters (DLC:Cu films) were deposited by reactive high power impulse magnetron sputtering (HIPIMS). HIPIMS pulse length (pulse on time) effects were considered. The dependence of the chemical composition on pulse length was found. Structure of diamond like carbon matrix of the nanocomposite films studied by Raman scattering spectroscopy has indicated weak increase of the sp 3 /sp 2 carbon bond ratio with HIPIMS pulse length. Studies of the shape and dimensions of copper nanoclusters performed by He ion microscopy have shown that increase of the HIPIMS pulse on time resulted in increased number of the nanoclusters and subsequent increase of the Cu nanoclusters size. Study of optical properties revealed surface plasmon resonance effect in all investigated films. Correlation between the optical absorption spectra and photoexcited charge carrier relaxation time recorded by the pump probe spectroscopy was found. The highest relaxation time was observed at the excitation wavelength close to the absorption surface plasmon resonance peak wavelength The highest maximum relaxation time was observed for the DLC:Cu film deposited by using HIPIMS pulse of 400 μs on time. It was explained by the dependence of the relaxation time on Cu nanocluster size.

KW - Copper

KW - Diamond-like carbon

KW - High-power pulsed magnetron sputtering

KW - Nanoclusters

KW - Optical properties

KW - Pulse length

KW - Structure

KW - X-ray photoelectron spectroscopy

U2 - 10.1016/j.tsf.2019.01.011

DO - 10.1016/j.tsf.2019.01.011

M3 - Journal article

AN - SCOPUS:85060299931

VL - 673

SP - 1

EP - 6

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

ER -