Design Criteria of a Thermal Mass Flow Sensor for Aircraft Air Data Applications

L. C. Ribeiro, M. L. Oliveira, R. A. Souza, S. P. L. Vieira, W. O. Avelino, C. F. R. Oliveira, S. W. de Lima Monteiro, F. S. Torres, Roana Melina de Oliveira Hansen

Publikation: Konferencebidrag uden forlag/tidsskriftPaperForskningpeer review

Resumé

The operating environment of aircraft air-data sensors is extremely aggressive with a wide temperature and humidity variation, suspension particles, icing and etc. The Pitot tube is widely used as air-data sensor on aircrafts, which has had many operational issues reported in the past decades due to ice-crystal obstruction of its aperture. The Microelectromechanical Systems (MEMS) technology associated with Thermal Mass Flow Sensors (TMFS) can establish a reformulation on air-data system instrumentation, since it is possible to create micro heaters and thermal sensors on the same substrate without moving parts, simplifying the operational requirements compliant to the aeronautics specifications. Exploring the simplicity and robustness of MEMS technology, a TMFS is herein designed according to criteria that meet aeronautic performance requirements, selecting adequate dimensions of the various structures in the sensor and materials compatible with semiconductor micromachining processes. This paper also presents the numerical results of the interaction of a thermal mass flowing through the integrated heater element of the sensor.

OriginalsprogEngelsk
Publikationsdatosep. 2018
StatusUdgivet - sep. 2018
Begivenhed31st Congress of the International Council of the Aeronautical Sciences - Belo Horizonte, Brasilien
Varighed: 9. sep. 201814. sep. 2018

Konference

Konference31st Congress of the International Council of the Aeronautical Sciences
LandBrasilien
ByBelo Horizonte
Periode09/09/201814/09/2018

Fingeraftryk

Aircraft
Sensors
Air
Aviation
MEMS
Micromachining
Hot Temperature
Ice
Atmospheric humidity
Semiconductor materials
Specifications
Crystals
Substrates
Temperature

Citer dette

Ribeiro, L. C., Oliveira, M. L., Souza, R. A., Vieira, S. P. L., Avelino, W. O., Oliveira, C. F. R., ... Oliveira Hansen, R. M. D. (2018). Design Criteria of a Thermal Mass Flow Sensor for Aircraft Air Data Applications. Afhandling præsenteret på 31st Congress of the International Council of the Aeronautical Sciences, Belo Horizonte, Brasilien.
Ribeiro, L. C. ; Oliveira, M. L. ; Souza, R. A. ; Vieira, S. P. L. ; Avelino, W. O. ; Oliveira, C. F. R. ; de Lima Monteiro, S. W. ; Torres, F. S. ; Oliveira Hansen, Roana Melina de . / Design Criteria of a Thermal Mass Flow Sensor for Aircraft Air Data Applications. Afhandling præsenteret på 31st Congress of the International Council of the Aeronautical Sciences, Belo Horizonte, Brasilien.
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title = "Design Criteria of a Thermal Mass Flow Sensor for Aircraft Air Data Applications",
abstract = "The operating environment of aircraft air-data sensors is extremely aggressive with a wide temperature and humidity variation, suspension particles, icing and etc. The Pitot tube is widely used as air-data sensor on aircrafts, which has had many operational issues reported in the past decades due to ice-crystal obstruction of its aperture. The Microelectromechanical Systems (MEMS) technology associated with Thermal Mass Flow Sensors (TMFS) can establish a reformulation on air-data system instrumentation, since it is possible to create micro heaters and thermal sensors on the same substrate without moving parts, simplifying the operational requirements compliant to the aeronautics specifications. Exploring the simplicity and robustness of MEMS technology, a TMFS is herein designed according to criteria that meet aeronautic performance requirements, selecting adequate dimensions of the various structures in the sensor and materials compatible with semiconductor micromachining processes. This paper also presents the numerical results of the interaction of a thermal mass flowing through the integrated heater element of the sensor.",
keywords = "Aerospace systems, Air Data Systems, Aircraft Navigation, Microelectromechanical Systems, Thermal Mass Flow Sensor",
author = "Ribeiro, {L. C.} and Oliveira, {M. L.} and Souza, {R. A.} and Vieira, {S. P. L.} and Avelino, {W. O.} and Oliveira, {C. F. R.} and {de Lima Monteiro}, {S. W.} and Torres, {F. S.} and {Oliveira Hansen}, {Roana Melina de}",
year = "2018",
month = "9",
language = "English",
note = "31st Congress of the International Council of the Aeronautical Sciences, ICAS ; Conference date: 09-09-2018 Through 14-09-2018",

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Ribeiro, LC, Oliveira, ML, Souza, RA, Vieira, SPL, Avelino, WO, Oliveira, CFR, de Lima Monteiro, SW, Torres, FS & Oliveira Hansen, RMD 2018, 'Design Criteria of a Thermal Mass Flow Sensor for Aircraft Air Data Applications' Paper fremlagt ved 31st Congress of the International Council of the Aeronautical Sciences, Belo Horizonte, Brasilien, 09/09/2018 - 14/09/2018, .

Design Criteria of a Thermal Mass Flow Sensor for Aircraft Air Data Applications. / Ribeiro, L. C. ; Oliveira, M. L. ; Souza, R. A.; Vieira, S. P. L. ; Avelino, W. O. ; Oliveira, C. F. R.; de Lima Monteiro, S. W. ; Torres, F. S. ; Oliveira Hansen, Roana Melina de .

2018. Afhandling præsenteret på 31st Congress of the International Council of the Aeronautical Sciences, Belo Horizonte, Brasilien.

Publikation: Konferencebidrag uden forlag/tidsskriftPaperForskningpeer review

TY - CONF

T1 - Design Criteria of a Thermal Mass Flow Sensor for Aircraft Air Data Applications

AU - Ribeiro, L. C.

AU - Oliveira, M. L.

AU - Souza, R. A.

AU - Vieira, S. P. L.

AU - Avelino, W. O.

AU - Oliveira, C. F. R.

AU - de Lima Monteiro, S. W.

AU - Torres, F. S.

AU - Oliveira Hansen, Roana Melina de

PY - 2018/9

Y1 - 2018/9

N2 - The operating environment of aircraft air-data sensors is extremely aggressive with a wide temperature and humidity variation, suspension particles, icing and etc. The Pitot tube is widely used as air-data sensor on aircrafts, which has had many operational issues reported in the past decades due to ice-crystal obstruction of its aperture. The Microelectromechanical Systems (MEMS) technology associated with Thermal Mass Flow Sensors (TMFS) can establish a reformulation on air-data system instrumentation, since it is possible to create micro heaters and thermal sensors on the same substrate without moving parts, simplifying the operational requirements compliant to the aeronautics specifications. Exploring the simplicity and robustness of MEMS technology, a TMFS is herein designed according to criteria that meet aeronautic performance requirements, selecting adequate dimensions of the various structures in the sensor and materials compatible with semiconductor micromachining processes. This paper also presents the numerical results of the interaction of a thermal mass flowing through the integrated heater element of the sensor.

AB - The operating environment of aircraft air-data sensors is extremely aggressive with a wide temperature and humidity variation, suspension particles, icing and etc. The Pitot tube is widely used as air-data sensor on aircrafts, which has had many operational issues reported in the past decades due to ice-crystal obstruction of its aperture. The Microelectromechanical Systems (MEMS) technology associated with Thermal Mass Flow Sensors (TMFS) can establish a reformulation on air-data system instrumentation, since it is possible to create micro heaters and thermal sensors on the same substrate without moving parts, simplifying the operational requirements compliant to the aeronautics specifications. Exploring the simplicity and robustness of MEMS technology, a TMFS is herein designed according to criteria that meet aeronautic performance requirements, selecting adequate dimensions of the various structures in the sensor and materials compatible with semiconductor micromachining processes. This paper also presents the numerical results of the interaction of a thermal mass flowing through the integrated heater element of the sensor.

KW - Aerospace systems

KW - Air Data Systems

KW - Aircraft Navigation

KW - Microelectromechanical Systems

KW - Thermal Mass Flow Sensor

M3 - Paper

ER -

Ribeiro LC, Oliveira ML, Souza RA, Vieira SPL, Avelino WO, Oliveira CFR et al. Design Criteria of a Thermal Mass Flow Sensor for Aircraft Air Data Applications. 2018. Afhandling præsenteret på 31st Congress of the International Council of the Aeronautical Sciences, Belo Horizonte, Brasilien.